ATLAS Pixel Sensor Design

Labeling rules and tracking information

Labeling rules and tracking information for structures on the ATLAS pixel prototype wafers fabricated by CiS and Seiko can be found at Dortmund's ATLAS pixel page.

Measurements

Measurements of CiS and Seiko prototypes before and after irradiation can be found at the following links.

Wafer Layout

The wafer layouts can be found at Dortmund's ATLAS pixel page. and MPI's ATLAS Pixel page.

Specifications for the prototypes

Request for Quotations Document - Technical Description of the First Pixel Prototype Sensors for ATLAS. Updated Apr 29, 1997.

Accompanying diagrams can be downloaded below. The wafer layout included with this package is outdated. Please see the Wafer Layout section above for links to the current wafer layout. Rather than downloading all the files separately, you can download everything (the specifications and the diagrams) in one go by getting the following tar file. You can either download a gzipped version or a "compressed" version.

rfqpackage.tar.gz (2.0 MB) or
rfqpackage.tar.Z (2.7 MB)

Figures for the RFQ:

Wafer Layout

Fig. 1: Layout of Tile 1 and Tile 2 and test structures on a 4 inch wafer. Please see the Wafer Layout section above for links to the current wafer layout.

Tile 1

Fig. 2, Overall view of n-side of Tile 1.
Fig. 2: Detail A Detail of corner.
Fig. 2: Detail B Detail of region between chips at the edge.
Fig. 2: Detail C Detail of region between chips in center.
Fig. 2: Detail D Detail of corner showing detail of pixel cell.
Fig. 2: Detail E Detail of routing between chips.
Fig. 2: Detail F Detail of region between chips at the edge. (Zoomed in view of Detail B)
Fig. 3, p-side of Tile 1.
Fig. 4, Cross section of bump bond.

Tile 2

These figures should be printed in color.

Fig. 5: Overview of tile 2.
Fig. 5, Detail A: Detail from the bias grid.
Fig. 5, Detail B: Detail of a pixel cell.
Fig. 5, Detail C: Detail of routing and dimensions of bias structure
Fig. 6: Detail of the p-side multiguard ring structure.
Fig. 7: Pixel region between the chips.
Fig. 8: Detail of the input/output busses on the detector.

Test Structures

Contributions of various test structures to be fabricated with the first ATLAS Pixel Prototype.

List of Structures on the ATLAS Pixel Prototype Sensor Wafer.

Links to sites which contain information on test structure included on the first ATLAS pixel prototype sensor wafer.

UNM test structures
- UNM test structures page
Udine test structures
- Udine Sensor Design Page
FNAL test structures
- Description
- Figures (PS file, 765 KB)

TDR (April 1997) Figures

1997 TDR figures for Tile 1